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This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Use this module to develop your learners' ability to control deposition equipment operations. The activities are adaptable to cleanroom or laboratory, and employ the Applied Materials Precision 5000 as a prototypical CVD tool. The module takes learners through a review of the deposition process, an introduction to the systems and subsystems of a CVD tool, and through an entire operations cycle from recipe interpretation through process control of inputs/outputs.
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