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This is a PDF version of lecture slides by Dr. Philip D. Rack (Assistant Professor, Department of Materials Science and Engineering at the University of Tennessee in Knoxville) that discuss information from the silicon's crystal structure to how to make doped semiconductors and the mechanics. Although the slides were written by Dr. Rack when he taught at the Rochester Institute of Technology, they are currently hosted by him at the University of Tennessee. Slide topics include plasma properties, DC glow discharge, ionization, plasma species, magnetrons, collisions, and chemical reactions. Numerous mathematical formulas are also presented.
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