Type:

Other

Description:

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. One third of modern semiconductor process steps and a variety of other applications employ plasma technology. RF energy is commonly used to generate and maintain a plasma which accelerates chemical processes or provides other desired outcomes such as light emission. This module is the first in a series that builds a knowledge foundation for understanding plasma technology and RF energy. Concepts and principles covered include particle behavior under plasma conditions, changes in electromagnetic wave forms, and related variables that affect RF/plasma applications.

Subjects:

  • Science > Engineering
  • Science > Technology
  • Education > General

Education Levels:

  • Grade 1
  • Grade 2
  • Grade 3
  • Grade 4
  • Grade 5
  • Grade 6
  • Grade 7
  • Grade 8
  • Grade 9
  • Grade 10
  • Grade 11
  • Grade 12

Keywords:

NSDL_SetSpec_ncs-NSDL-COLLECTION-000-003-112-021,Education,oai:nsdl.org:2200/20130102193038085T,Vocational Education -- Technology,Technical Education (Lower Division),Undergraduate (Upper Division),Undergraduate (Lower Division),Vocational Education -- Instructional issues,NSDL,Technical Education (Upper Division),Engineering,Higher Education,Science -- Instructional issues,Science -- Engineering,Technology,Vocational/Professional Development Education,Graduate/Professional,Science -- Technology

Language:

English

Access Privileges:

Public - Available to anyone

License Deed:

Creative Commons Attribution Non-Commercial Share Alike

Collections:

None
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