Type:

Other

Description:

This website includes a brief overview of the technology and some of the methods used to create microstructures, or MEMS (MicroElectricalMechanical Systems), including an overview of the 3 basic building blocks: deposition, lithography, and etch.

Subjects:

  • Science > Engineering
  • Science > Technology
  • Education > General

Education Levels:

  • Grade 1
  • Grade 2
  • Grade 3
  • Grade 4
  • Grade 5
  • Grade 6
  • Grade 7
  • Grade 8
  • Grade 9
  • Grade 10
  • Grade 11
  • Grade 12

Keywords:

Informal Education,NSDL_SetSpec_ncs-NSDL-COLLECTION-000-003-112-021,Education,NSDL,Undergraduate (Upper Division),Technical Education (Lower Division),Undergraduate (Lower Division),Vocational Education -- Instructional issues,General Public,Vocational Education -- Technology,Technical Education (Upper Division),Engineering,Higher Education,Science -- Instructional issues,oai:nsdl.org:2200/20130102192635648T,Science -- Engineering,Technology,Vocational/Professional Development Education,Graduate/Professional,Science -- Technology

Language:

English

Access Privileges:

Public - Available to anyone

License Deed:

Creative Commons Attribution Non-Commercial Share Alike

Collections:

None
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