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This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. Semiconductor manufacturing equipment requires the use of many different types of vacuum gauges. Selection is based on range of process operations and production requirements. This MATEC module explores the theory and functionality of vacuum gauges and provides many examples of different types of gauges. The focus is on understanding the operating ranges and application constraints of each type of gauge. Mathematical equations are used to explain calibration, sensitivity, and overall operations of each type of gauge.
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