Type:

Other

Description:

This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. In this module, your learners begin to master the sensitive after develop inspection (ADI) methods that follow photolithography. MATEC describes macro- and micro-inspection techniques and distinguishes qualitative (inspection) from quantitative (metrology) methods. The chief focus is on teaching learners to examine wafers under an optical microscope; a simulated microscope is also provided in a computer-based training (CBT) format. The module covers edge bead inspection and provides extensive practice in flash boundary inspection, including evaluating Nikon crosses, overlay boxes, scanning electronic microscope features, resolution bars, Verniers, and product identification numbers.

Subjects:

  • Science > Engineering
  • Science > Technology
  • Education > General

Education Levels:

  • Grade 1
  • Grade 2
  • Grade 3
  • Grade 4
  • Grade 5
  • Grade 6
  • Grade 7
  • Grade 8
  • Grade 9
  • Grade 10
  • Grade 11
  • Grade 12

Keywords:

NSDL_SetSpec_ncs-NSDL-COLLECTION-000-003-112-021,oai:nsdl.org:2200/20121203193437082T,NSDL,Technical Education (Upper Division),Technical Education (Lower Division),Undergraduate (Upper Division),Undergraduate (Lower Division),Vocational Education -- Instructional issues,Vocational Education -- Technology,Higher Education,Engineering,Education,Science -- Instructional issues,Science -- Engineering,Technology,Vocational/Professional Development Education,Graduate/Professional,Science -- Technology

Language:

English

Access Privileges:

Public - Available to anyone

License Deed:

Creative Commons Attribution Non-Commercial Share Alike

Collections:

None
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