Type:

Other

Description:

This website includes an animation for the Workflow in the CVD Tool. Objective: The steps in the CVD process cycle will be a unique step in the recipe. There may be more steps, or minor variations, but most CVD process recipes will look very similar to the sequence below and illustrated in the animation repeated here for review.This simulation is from Module 055 of the Process & Equipment I Cluster of the MATEC Module Library (MML). To view other clusters or for more information about the MML visit http://matec.org/ps/library3/process_I.shtmlKey

Subjects:

  • Science > Chemistry
  • Science > Engineering
  • Science > Technology
  • Science > Physics
  • Education > General

Education Levels:

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Keywords:

NSDL_SetSpec_ncs-NSDL-COLLECTION-000-003-112-021,Chemistry,NSDL,oai:nsdl.org:2200/20121203193527335T,Technical Education (Upper Division),Technical Education (Lower Division),Physics,Science -- Chemistry,Undergraduate (Upper Division),Undergraduate (Lower Division),Science -- Physics,Vocational Education -- Instructional issues,Higher Education,Engineering,Education,Science -- Instructional issues,Science -- Engineering,Technology,Vocational/Professional Development Education,Graduate/Professional,Science -- Technology

Language:

English

Access Privileges:

Public - Available to anyone

License Deed:

Creative Commons Attribution Non-Commercial Share Alike

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